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vacuum_controll

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Vacuum controll

A vacuum controll instruments are implemented in the cryostat. As a pump functions the HighCube 80eco, as a sensor a PKR 251 connected to a TPG361 is used, all from PFEIFFER Vacuum. A solenoid valve is implemented in the system to separate the cryostat from the pump. As a solenoid valve funtions the 0211 from Bürkert, it is a normally closed device, meaning applying energy will open the device. If it's Powered on it connects the pump to the chamber. Furthermore, the vacuum pump and the solenoid valve are both controlled via the PDU, while the single gauge is controlled via a LabVIEW Script via the server.

Starting Procedure

First turn the vacuum pump on, and then make sure that the Turbomolacularpump is turned off. Only start the vacuum pump when you are sure that the Turbo is off, then start the compressor pump, when the pressure reaches the lower single digits (5 mbar >) turn the Turbomolacularpump on.

TPG 361

The pressure within the Cryostat is monitored with a Single Gauge TPG361 from Pfeiffer Vaccum, which uses a PKR 251 FPM-sealed, DN 25 ISO-KF gauge sensor. The maximum pressure applies to inert gases and temperatures below 55 °C and is corrosion resistant. The TPG361 is designed for installation to a 19“ rack chassis adapter according to DIN 41494 and provides serial communication via R485 (24V, 5-pin circular), USB and Ethernet interfaces.It is used to measure the pressure inside the chamber.

Characteristic TPG 361
Pressure Sensor Type Piezo-resistive Pressure Sensor
Operating Principle Resistive change due to pressure applied, converts pressure into electrical signal
Resolution 0.01% of full scale
Measuring Range 10 mbar to 1000 bar
Minimum Sensing Value 10 mbar

HighCube 80 eco

The HighCube 80 eco from Pfeiffer is uses as a turbumolacular vacuum pump. It allows for a pressure range below 10e(-7)pa. It is possible to remote controll the pump, for this a RS-485 to LAN converter is installed (Moxa Serial LAN device).

Characteristic HighCube 80 Eco
Pressure Sensor Type Capacitive Pressure Sensor
Operating Principle Absolute pressure measurement, capacitive sensing element detects pressure variations
Resolution 0.1 mbar
Measuring Range 1 mbar to 1000 bar
Minimum Sensing Value 1 mbar

* Manual

Flowchart

For better understanding on how the different components of the vacuum subsystem are linked together, the following scheme is provided:

vacuum_system_flow_chart_1.jpg

Vacuum system configuration

The Pfeiffer Vacuum's HighCube 80eco consist of multiple subsystem, in the following table it is shown which setup uses what kind of subsystem:

Subsystem DAMIC-M@Zurich DARMA
Name Model Nr. Manuals Name Model Nr. Manuals
Roughening Pump MVP 015-2 Not visible MVP 015-2 Not visible
Turbomolecular Pump High Pace 80 PM P03 940A Operational Instructions High Pace 80 PM P03 940A Operational Instructions
Power Supply Unit TPS110 PM 061 340-T TPS110 manual Not visible
Control Unit TC110 PM C01 790 A Operation Instructions TC110 PM C01 790 A Operation Instructions
Venting Valve Power Failure Vent PM Z01 330 A Vent Valve manual Power Failure Vent PM Z01 330 A Vent Valve manual
Cooling Fan Air cooling Kit 24V PM Z01 300 A Air cooling manual Air cooling Kit 24V PM Z01 300 A Air cooling manual
Front control Panel DCU002 PM 061 348 AT DCU002 DCU002 PM 061 348-T DCU002
Gauge TPG261 TPG28030 TPG261 Manual and Communication TPG361 PT G28 040 TPG361 Communication Protocol manual
Vacuum Sensor PKR251 2000006133 / PT R26 000 PKR251 manual PKR251 PTR26000 PKR251 manual
vacuum_controll.1778060923.txt.gz · Last modified: by simon